JPS6114651B2 - - Google Patents

Info

Publication number
JPS6114651B2
JPS6114651B2 JP11723078A JP11723078A JPS6114651B2 JP S6114651 B2 JPS6114651 B2 JP S6114651B2 JP 11723078 A JP11723078 A JP 11723078A JP 11723078 A JP11723078 A JP 11723078A JP S6114651 B2 JPS6114651 B2 JP S6114651B2
Authority
JP
Japan
Prior art keywords
single crystal
vapor phase
crystal substrate
substrate
epitaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11723078A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5543882A (en
Inventor
Shinichi Hasegawa
Hisanori Fujita
Kunio Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Monsanto Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Monsanto Chemical Co filed Critical Mitsubishi Monsanto Chemical Co
Priority to JP11723078A priority Critical patent/JPS5543882A/ja
Publication of JPS5543882A publication Critical patent/JPS5543882A/ja
Publication of JPS6114651B2 publication Critical patent/JPS6114651B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Led Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP11723078A 1978-09-22 1978-09-22 Gaseous-phase growing of compound semiconductor epitaxial film Granted JPS5543882A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11723078A JPS5543882A (en) 1978-09-22 1978-09-22 Gaseous-phase growing of compound semiconductor epitaxial film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11723078A JPS5543882A (en) 1978-09-22 1978-09-22 Gaseous-phase growing of compound semiconductor epitaxial film

Publications (2)

Publication Number Publication Date
JPS5543882A JPS5543882A (en) 1980-03-27
JPS6114651B2 true JPS6114651B2 (en]) 1986-04-19

Family

ID=14706599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11723078A Granted JPS5543882A (en) 1978-09-22 1978-09-22 Gaseous-phase growing of compound semiconductor epitaxial film

Country Status (1)

Country Link
JP (1) JPS5543882A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6386048U (en]) * 1986-11-20 1988-06-04

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2507888B2 (ja) * 1988-11-19 1996-06-19 工業技術院長 ヘテロ構造体の製造方法
JP5281535B2 (ja) * 2009-10-06 2013-09-04 スタンレー電気株式会社 半導体発光装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6386048U (en]) * 1986-11-20 1988-06-04

Also Published As

Publication number Publication date
JPS5543882A (en) 1980-03-27

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